Report Number : 8653-002
Cleanrooms & Contamination Control in VLSI Manufacturing
Technological issues and trends in cleanroom design and related issues of contamination of wafers from liquid and gaseous chemicals, deionized water, and ambient air. Description of the world's cleanrooms presented, discussing all the details of each of these fabs, segmented by geographical region. Also discussed are the markets for filters and the growth and strategic issues in cleanroom construction
Countries Covered : World
Scope : 275pp Price : $1,495+ Frequency : Continuous
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